Starting the SEM

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SEM gun controls

Fil I and Fil I Target are the filament heating current and heating current set point. They control the so-called filament saturation. It is usually around 1.9-2.0, and is set when each new filament is set up. Don’t touch them.

The beam current is for the electron beam up at the gun. It should stay at 40 microamps. Don’t touch.

SEM aperture controls

Fil I Target is the filament heating current set point, controlling filament saturation. Don’t touch.