We have an ESI image GEO-193 laser ablation. It has a pulsed 193 nm ArF* laser, a repetition rate up to 500 Hz, a pulse power up to about 15 J/cm2, round spot sizes of 1-220 μm, square to rectangular spots up to 220 μm long at any angle, and a pulse width of ~10 ns. It’s almost 100% computer controlled, including stage X, Y, and Z movement, spot size, and setting ablation points, lines, curves, grids, and oddly-shaped areas. The set ablation regions can be analyzed automatically in sequence.
